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optiX fab is a Fraunhofer IOF spin-off. The company was founded in 2012 to commercialize Fraunhofer IOF’s EUV optics research and development activities. optiX fab designs, develops and fabricates EUV imaging, illumination and collector optics. It is currently supplying chipmakers, EUV tool and source manufacturers as well as institutes, universities, synchrotron beamlines and EUV research consortia worldwide with customized multilayer and grazing incidence optics for EUV lithography applications at 13.5 nm and the entire XUV, soft and hard X‑ray spectral range.