OptoNet Member › optiX fab GmbH

optiX fab is a Fraun­ho­fer IOF spin-off. The com­pany was foun­ded in 2012 to com­mer­cia­lize Fraun­ho­fer IOF’s EUV optics rese­arch and deve­lo­p­ment acti­vi­ties. optiX fab designs, deve­lops and fab­ri­ca­tes EUV ima­ging, illu­mi­na­tion and collec­tor optics. It is cur­r­ently sup­ply­ing chip­ma­kers, EUV tool and source manu­fac­tu­rers as well as insti­tu­tes, uni­ver­si­ties, syn­chro­tron beam­li­nes and EUV rese­arch con­sor­tia world­wide with cus­to­mi­zed mul­ti­layer and gra­zing inci­dence optics for EUV litho­gra­phy app­li­ca­ti­ons at 13.5 nm and the ent­ire XUV, soft and hard X‑ray spec­tral range.